Parameter | Accuracy | Instrument |
Surface Figure |
0.05 waves PV |
12" Zygo GPI-xp |
Surface Roughness | +/- 1 angstrom | Wyko & Chapman Surface Profilers |
Reflectance | +0.5 %R | Perkin Elmer 1050 Perkin Elmer Spectrum Optica 100 |
Mechanical Dimensions | 1.0 microns | Zeiss CMM Micro Height Indicators |
Angular | 0.5 arc second 0.25 arc second |
Nikon Autocollimator AA Gauge Indexers |
Perpendicularity |
0.4 arc second |
Nikon Autocollimator |
Surface Inspection per mil spec. | MIL-O-13830 | High Intensity Lights Scratch/Dig Standards |
Environmental per mil spec. | MIL-C-48497, MIL-C-675, MIL-F-48416 | Temp/Humidity Chambers |
Metal Optics Quality
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