| Parameter | Accuracy | Instrument |
|
Surface Figure |
0.005 waves |
6 Zygo Interferometers up to 18" 12" VERIFIRE |
| Spectral Characteristics |
+/- 0.05 %T |
Hitachi U-4100 Perkin Elmer 1600 FTIR Perkin Elmer Spectrum Optica 100 |
| Thickness Dimension |
+0.05 microns |
Heidenhain Drop-Dial Indicator |
| Parallelism 1 arc second | 1 arc second |
Zygo Interferometer |
| Prism angles |
2 sec |
Trioptics Prism Master |
| Scratch & Dig | MIL-PRF-13830-ISO 10110 | Standard lighting, high Intensity fiber optics lighting S&D Standards |
| Environmental per mil spec. | Hot, cold, humidity, salt fog per mil sec. MIL-C-48497, MIL-C-675, MIL-F-48416 |
Tenney Micro-Temm II, BMA, Associated |
| Crystal Orientation | +/- 5 arc second | Double Crystal X-Ray Spectrometer |