Overview

X-ray Toroids

X-ray toroids, a type of curved single crystal, efficiently focus x-ray emissions in a variety of applications–including semiconductor inspection, laboratory surface analysis and plasma diagnostics. Inrad fabricates and finishes x-ray toroids that offer:

• Interferometrically verified surface profiles
• Small X-Ray spot sizes
• Verified quality for thinned crystals
• Uniform-intensity diffraction profiles
• Precise crystal orientations
• Optimized diffraction
• Low damage to crystal planes
• Vacuum-compatible assemblies composed of non-outgassing materials

Specifications

Inrad produces toroid x-ray optics to the following standard specifications:

• Manufacturing tolerance for the crystal plane orientation is typicall 0.1 degrees with 20 arc-seconds being possible in some situations
• The rocking curve width (FWHM) of the finished crystal, measured before bending, is less than 20 arc-seconds
• Tolerance for the radii of curvature of the crystal is 0.5% of the radii Ratio of Rv/Rc is accurate to between two and three decimal places
• Reflected wavefront of the toroidal assembly is better than λ/4 per inch, measured at 633 nm

These standard specifications represent typical tolerances. Inrad Optics can produces curved x-ray crystals to custom specifications.