Custom Optics

Overview

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Inrad Optics specializes in the production of challenging custom optics for semiconductor, defense, laboratory and industrial applications. We fabricate and finish a wide range of customized transmission flats, mirrors, beam combiners and waveplates in glass, quartz and other crystalline materials. Our proprietary manufacturing techniques and metrology expertise give our optics a performance edge in technically demanding applications, including:

Large optics. Custom optics up to 18-inches across are produced in our Northvale, NJ facility.
Super precision optics. With applications such as interferometer flats for the semiconductor industry, our super-precision optics can achieve:
- Flatness to λ/20 or better at 633 nm over 95% clear aperture
- Irregularity to λ/20 or better at 633 nm over 95% clear aperture
- Surface quality to 10/5
Opto-mechanical assemblies. Nearly all of the custom optics ultimately work as part of an assembly. Our engineering teams works with all our customers to identify and eliminate assembly-related stresses that could damage optical components.

Flats

Interferometer Flats

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Our expertise in super-precision interferometer transmission flats begins with a deep understanding of the optical material. Its homogeneity, birefringence and other intrinsic characteristics all affect the performance of the finished optic.

Based on our thorough understanding of the optical principles underlying interferometer applications, we can tailor our optical polishing processes to produce finished optical surfaces that conform to the most demanding technical requirements related to:

Surface roughness
Sub-surface damage
Slope error
Optical coating consistency

Custom Coating

Custom coating required by super precision interferometer optics is as exacting a process as the optics fabrication itself. Our custom coatings for interferometer applications include:

Partial reflective coatings
Partial absorptive coatings
AR coatings

Typical Specifications

Flatness. λ/20 or better @ 633nm P-V over 95% of aperture
Irregularity. λ/20 or better @ 633nm P-V over 95% of aperture
Surface Quality. 10:5 over 95% of aperture
Clear Aperture. 95% of the surface

Windows & Small Flats

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Inrad Optics fabricates a variety of customized small flats, all to exceptional quality standards. All flats are fabricated, polished, and tested in our Northvale, NJ facility, ensuring complete traceability and satisfaction with every single product.

Flats Specifications
	Windows, Transmission on Flats, Reticles	Wedges	Etalons	Filters
Materials	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	NiSo₃
Dimensions	OD 5mm or OD 19" or 5.5mm or 15" x 12" ± 0.10mm ± 0.5mm Thickness 50μm.	OD 5mm or OD 19" or 5.5mm or 15" x 12" ± 0.10mm ± 0.5mm Thickness 50μm.	OD 5mm or OD 19" or 5.5mm or 15" x 12" ± 0.10mm ± 0.5mm Thickness 50μm.	OD 5mm or OD 19" or 5.5mm or 15" x 12" ± 0.10mm ± 0.5mm Thickness 50μm.
Angle, Beam deviation, Perpendicularity	1" Contacting >5' blocking	<±3 min contact 3-5 min Partial contact >12min Block	1" Contacting >5min blocking	1" Contacting >5min blocking
Flatness	λ/20	λ/20	λ/20	λ/5
Surface	λ50 spec.	λ50 spec.	λ50 spec.	λ50 spec.
T&R WF	λ/10	λ/20	λ/20	λ/10
Coatings	Reflective 98% R; AR <0.2 R%	Reflective >99.5% R; AR <0.2% R	Reflective 98% R; AR <0.2 R%	Reflective >99.5% R; AR <0.2% R
Edge Chips	0.1-0.15mm	0.1-0.15mm	0.1-0.15mm	0.1-0.15mm
Bevel	0.25mm x 45º	0.25mm x 45º	0.25mm x 45º	0.25mm x 45º

Lenses

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Inrad produces a variety of custom lenses to demanding specifications. All lenses are fabricated, polished and coated in our own facilities, ensuring complete traceability and assured quality.

Lenses Specifications
Materials	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass
Dimensions	OD 3mm Φ 220mm OD tol ±0.10mm ±0.05mm±0.01mm OD 12 - 120 mm CNC processing
Centering Error	Reg. > 1' >Special 30"
Surface Quality	Up to 0:0
Flatness Irregularity	Test plate fit λ/4 - λ/5 /Radius error Fit λ/2 - λ Zygo Interferometer Laser Radius scale λ/10 - λ/20 depends on the curvature
Coatings	AR <0.2 R%
Edge Chip	0.1 - 0.15mm
Bevel	0.25mm x 45º

Mirrors

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Inrad fabricates and coats custom mirrors up to 19-inches across. All mirrors are fabricated, polished, and tested in our Northvale, NJ facility, ensuring complete traceability and satisfaction with every single product.

Mirror Specifications
Materials	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass
Dimensions	OD 5mm ® OD 19" or 5.5mm ® 15" x 12" ± 0.10mm ± 0.5mm Thickness 0.1μm. Best OD to thickness ratio 8:1 for high precision optics
Angle, Beam deviation, Perpendicularity	1" Contacting >5' blocking
Flatness	λ/20 or better
Coatings	Reflective 98% R AR <0.2 R%
Edge Chips	0.1-0.15mm
Bevel	0.25mm x 45º

Beam Optics

Beam Splitters & Combiners

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Inrad offers a wide range of beam splitter and combiner models. All fabricated and finished at our Northvale, NJ, facility.

Prisms

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Inrad offers a wide range of custom prisms, all fabricated and finished at our Northvale, NJ, facility. Specifications include:

Prisms Specifications
	Single	B/S	Speciality	Rochons	Calcite Polarizers	Glan Taylor	Glan Thompson
Materials	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2 Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals, Filter Glass	Optical Glass, Quartz, Calcite, MgF2, Crystals,Filter Glass
Dimensions	5.5mm - 4 x 4" ± 0.1 - 0.05mm	5.5mm - 4 x 4" ± 0.1 - 0.05mm	3 x 3mm	5.5mm - 4 x 4" ± 0.1 - 0.05mm	5.5mm - 4 x 4" ± 0.1 - 0.05mm	5.5mm - 4 x 4" ± 0.1 - 0.05mm	5.5mm - 4 x 4" ± 0.1 - 0.05mm
Angle, Beam deviation, Perpendicularity	<±3 min® contact 3-5 min® Partial contacting, 12min (all Blocking no contacting)
Surface Quality	20-10 MIL 1308 10-5	20-10 MIL 1308 10-5	20-10 MIL 1308 10-5	60-40 40-20	60-40 40-20	60-40 40-20	60-40 40-20
Flatness	λ/20 Reg.	λ/20 Reg.	λ/20 Reg.
Surface	λ/50 Reg.	λ/50 Reg.	λ/50 Reg.	λ/50 Reg.	λ/50 Reg.	λ/50 Reg.	λ/50 Reg.
Transmitted and Reflected Wavefront	λ/10 - λ/5	λ/10 - λ/5	λ/10 - λ/5	λ/10 - λ/5	λ/10 - λ/5	λ/10 - λ/5	λ/10 - λ/5
Coatings	Reflective 98% R AR <0.2 R%	BS 50/50 45/55 PBS
Edge Chips	0.1-0.15mm
Bevel	0.25mm x 45º

Polarizers

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Inrad Optics manufactures prism polarizers from calcite, magnesium fluoride, α-BBO and custom materials. In addition to custom polarizers, our standard designs include:

Glan-Laser
Glan-Thompson
Rochon

We also make polarizers can also be made from single pieces of birefringent material. In birefringent polarizers, beam separation separation takes place via a wedged optic or the walk-off of one polarization relative to another over the length of the optic.

In-house production

Inrad Optics offers a wide range of beam splitter and combiner models. All fabricated and finished at our Northvale, NJ, facility, ensuring complete traceability and assured quality.

Waveplates

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Inrad offers a wide variety of custom waveplates. Specifications follow:

Waveplates Specifications
	Micro	True Zero Order	Zero Order	Multiple Order	Retardation Plates	Rotator
Material		Synthetic Quartz
Parallelism		1 second or better	2 sec.-contacted 1-3 min. cemented		1 second or better	1 second or better
Orientation Mark	External or Indelible Ink, Edge broken	Flats	Flats	Flats
Size		Up to 2.0 OD (1.5 x 2mm smallest)
Thickness		35 - 125μm ±0.1μm
Retardation Tolerance		λ/200 Std. λ/300 or λ/500	λ/200 Std. λ/300 or λ/500	λ/200 Std. λ/300 or λ/500	λ/200 Std. λ/300 or λ/500	λ/200 Std. λ/300 or λ/500
Edge Chip	35μm	Std. 100-150μm	Std. 100-150μm	Std. 100-150μm	Std. 100-150μm	Std. 100-150μm
Orientation Tolerance		15 min 3 min.	15 min 3 min.	15 min 3 min.	15 min 3 min.	15 min 3 min.
Transmitted Wave Front		up to λ/20 or better	contacted λ/10 sm clear aperture, contacted λ/5-big clear aperture	± λ/10
Coating		R<0.2% up BW 200-250 nm	R<0.2% up BW 200-250 nm	R<0.2% up BW 200-250 nm	R<0.2% up BW 200-250 nm	R<0.2% up BW 200-250 nm
Packaging		Gel Pack	Tissue & Plastic Box	Tissue & Plastic Box	Tissue & Plastic Box	Tissue & Plastic Box
Scratch/Dig		10/5 CA or better	10/5 CA or better	10/5 CA or better	10/5 CA or better	10/5 CA or better